Two-dimensional Dopant Profile Measurements by Scanning Capacitance Microscopy.
نویسندگان
چکیده
منابع مشابه
Scanning capacitance microscopy of nanostructures
A theory is developed for scanning capacitance microscopy sSCMd of samples containing quantum wells, nanowires, and nanodots. The observed SCM image does not reproduce the geometric characteristics of the system but can be used for extracting some important information. For quantum wells and nanowire arrays, SCM gives an opportunity to determine the doping level of nanostructures. For individua...
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 1999
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.20.27